Pregunta de entrevista de Lam Research
How would you increase anisotropy during an etch process?
Respuestas de entrevistas
Anónimo
14 nov 2016
Add inhibitor to gas flow, increase substrate bias, or reduce chamber pressure.
How would you increase anisotropy during an etch process?
Anónimo
Add inhibitor to gas flow, increase substrate bias, or reduce chamber pressure.